Stable pull-in electrodes for narrow gap actuation

Stable pull-in electrodes for narrow gap actuation
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DOI：
10.1109/memsys.2014.6765883
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发表时间：
2014-03
期刊：
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
影响因子：
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通讯作者：
E. Ng;Yushi Yang;V. Hong;C. Ahn;D. L. Christensen;B. Gibson;K. Qalandar;K. Turner;T. Kenny
E. Ng;Yushi Yang;V. Hong;C. Ahn;D. L. Christensen;B. Gibson;K. Qalandar;K. Turner;T. Kenny
中科院分区：
其他
文献类型：
--
作者：
E. Ng;Yushi Yang;V. Hong;C. Ahn;D. L. Christensen;B. Gibson;K. Qalandar;K. Turner;T. Kenny

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本文报道了使用可移动电极，可以静电拉，以实现超越光刻/蚀刻能力的窄间隙。具有50 MHz的频率和150 k的品质因数的宽度延伸谐振器被证明与这样的可移动电极具有显着较低的动态阻抗时，发生牵引。亚ppm的稳定性超过105拉入/拉出周期的测量使用温度补偿谐振器内epi-seal外延多晶硅封装工艺。拉入现象是可逆的，但可以通过将拉入电极电焊到止动件上而使拉入现象永久化。
This paper reports the use of movable electrodes that can be electrostatically pulled in to achieve narrow gaps beyond lithography / etch capabilities. Width-extensional resonators with frequencies of 50 MHz and quality factors of 150k are demonstrated with such movable electrodes to have a significantly lower motional impedances when pullin occurs. Sub-ppm stability over 105 pull-in/pull-out cycles is measured using temperature-compensated resonators within the epi-seal epitaxial polysilicon encapsulation process. The pull-in phenomena is reversible, but can be made permanent by electrically welding the pulled-in electrode to a stop.