Yang HS, Iwamoto C, Yoshida T: "Nanostructures of the turbostratic BN transition layer in cubic BN thin films deposited by low-pressure inductively coupled plasma-enhanced chemical vapor deposition"Journal of Applied Physics. 91. 6695-6699 (2002)
Yang HS, Iwamoto C, Yoshida T: "Nanostructures of the turbostratic BN transition layer in cubic BN thin films deposited by low-pressure inductively coupled plasma-enhanced chemical vapor deposition"Journal of Applied Physics. 91. 6695-6699 (2002)
复制标题
杨华生,岩本C,吉田T:“低压电感耦合等离子体增强化学气相沉积立方BN薄膜中乱层BN过渡层的纳米结构”应用物理杂志。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: