Review: Automatic Model Reduction for Transient Simulation of MEMS‐based Devices
Review: Automatic Model Reduction for Transient Simulation of MEMS‐based Devices
复制标题
DOI：
10.1002/seup.200211105
复制
发表时间：
2002-12
期刊：
影响因子：
--
通讯作者：
E. Rudnyi;J. Korvink
中科院分区：
文献类型：
--
作者：
E. Rudnyi;J. Korvink
基于MEMS的器件的快速发展需要耦合物理域（热、机械、电等）的3D时变仿真。这反过来又需要解决高维常微分方程（ODE），从空间离散化的设备。然而，代替“蛮力”方法来集成大型常微分方程系统，可以使用现代数学方法来降低系统的维数。本文的目的是从工程的角度来审查他们。它表明，在许多情况下，重要的实践中的ODE的顺序可以减少几个数量级，几乎不牺牲精度。
The rapid development of MEMS-based devices requires 3D time-dependent simulations for coupled physical domains (thermal, mechanical, electrical, etc.). This in turn requires the solution of high-dimensional ordinary differential equations (ODEs) that result from space discretization of the device. However, instead of a “brute force” approach to integrate a large system of ODEs, one can use modern mathematical methods to reduce the system's dimension. The goal of the present paper is to review them from an engineering perspective. It is shown that in many cases important for practice the order of ODEs can be reduced by several orders of magnitude almost without sacrificing precision.