Development of a self-packaged 2D MEMS thermal wind sensor for low power applications
Development of a self-packaged 2D MEMS thermal wind sensor for low power applications
复制标题
开发适用于低功耗应用的自封装 2D MEMS 热风传感器
DOI：
10.1088/0960-1317/25/8/085011
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发表时间：
2015-08-01
影响因子：
2.3
通讯作者：
Huang, Qing-an
中科院分区：
文献类型：
--
作者：
Zhu, Yan-qing;Chen, Bei;Huang, Qing-an
本文介绍了一种自行封装的二维热风传感器的设计、制作和测试。该传感器由四个加热器和九个热敏电阻组成。一个中央热敏电阻感测加热器的平均温度，而其他八个热敏电阻对称分布在加热器周围，测量传感器上下游表面之间的温差。该传感器是在玻璃硅(SIG)衬底的一侧实现的。衬底中的垂直硅孔确保了传感器和气流之间良好的热接触，玻璃有效地将加热器与热敏电阻隔离。采用玻璃回流工艺制作基片，然后通过剥离工艺实现传感器。通过仿真对传感器的几何结构进行了研究。这些结果表明，加热器窄、加热器间距适中以及衬底较薄都能提高传感器的灵敏度。最后，利用线性插值法在风洞中对传感器进行了测试和标定。在恒定加热功率为24.5mW时，测量结果表明，该传感器可以检测到高达25 m m S−1的气流速度，低速时的精度为0.1 m S−1，高速时的精度为0.5 m S−1。在360°范围内可确定气流方向，测量精度为±6°。
This article describes the design, fabrication, and testing of a self-packaged 2D thermal wind sensor. The sensor consists of four heaters and nine thermistors. A central thermistor senses the average heater temperature, whereas the other eight, which are distributed symmetrically around the heaters, measure the temperature differences between the upstream and downstream surface of the sensor. The sensor was realized on one side of a silicon-in-glass (SIG) substrate. Vertical silicon vias in the substrate ensure good thermal contact between the sensor and the airflow and the glass effectively isolates the heaters from the thermistors. The substrate was fabricated by using a glass reflow process, after which the sensor was realized by a lift-off process. The sensor’s geometry was investigated with the help of simulations. These show that narrow heaters, moderate heater spacing, and thin substrates all improve the sensor’s sensitivity. Finally, the sensor was tested and calibrated in a wind tunnel by using a linear interpolation algorithm. At a constant heating power of 24.5 mW, measurement results show that the sensor can detect airflow speeds of up to 25 m s−1, with an accuracy of 0.1 m s−1 at low speeds and 0.5 m s−1 at high speeds. Airflow direction can be determined in a range of 360° with an accuracy of ±6°.