Y. Takaki,Y. Setsuhara,S. Miyake,M. Kumagai,Y. Sakawa,and T. Shoji: "Formation of Superhard Nitride Films by High-Density Helicon-Plasma Sputtering"Proceedings of the 17th Symposium on Plasma Processing. 383-386 (2000)
Y. Takaki,Y. Setsuhara,S. Miyake,M. Kumagai,Y. Sakawa,and T. Shoji: "Formation of Superhard Nitride Films by High-Density Helicon-Plasma Sputtering"Proceedings of the 17th Symposium on Plasma Processing. 383-386 (2000)
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Y.高木，Y.
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