Directed Self-Assembly of Lamellar Copolymers: Effects of Interfacial Interactions on Domain Shape.
Directed Self-Assembly of Lamellar Copolymers: Effects of Interfacial Interactions on Domain Shape.
复制标题
层状共聚物的定向自组装：界面相互作用对域形状的影响。
DOI：
10.1021/mz300331k
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发表时间：
2012
影响因子：
7.015
通讯作者：
G. Stein
中科院分区：
文献类型：
--
作者：
G. M. Perera;Chengqing C. Wang;M. Doxastakis;R. J. Kline;Wen;A. Bosse;G. Stein
通过小角度 X 射线散射剖面的定量分析，计算出聚（苯乙烯-b-甲基丙烯酸甲酯）（PS-PMMA）线光栅（46 nm 间距）的深度依赖结构。这些数据表明，在基板界面附近，域形状发生显着变形，其中局部 PS 域形状类似于沙漏。体平衡尺寸在 64 nm 厚薄膜的中心附近恢复。基于自洽场理论的模拟表明，基材附近的变形是由共聚物域广泛渗透到下面的基材涂层（PS 刷）中引起的。这些发现表明，用于嵌段共聚物定向自组装的新涂层除了定制表面能量之外还应考虑共聚物渗透长度。此外，考虑到同步加速器 X 射线散射的分辨率和整体平均特征，我们认为它有可能成为高密度、亚 10 nm 特征的“黄金标准”或“基准”尺寸计量和库验证工具。
The depth-dependent structure of a poly(styrene-b-methylmethacrylate) (PS-PMMA) line grating (46 nm pitch) was calculated from quantitative analysis of small-angle X-ray scattering profiles. These data demonstrate that domain shapes are significantly deformed near the substrate interface, where the local PS domain shape resembles an hourglass. The bulk equilibrium dimension is recovered near the center of a 64 nm thick film. Simulations based on self-consistent field theory suggest that deformations near the substrate are caused by extensive penetration of the copolymer domains into the underlying substrate coating (a PS-brush). These findings suggest that new coatings for block copolymer directed self-assembly should consider copolymer penetration lengths in addition to tailoring surface energetics. Furthermore, given the resolution and ensemble-averaging features of synchrotron X-ray scattering, we argue that it has the potential to emerge as a "gold-standard" or "benchmark" dimensional metrology and library validation tool for high density, sub-10 nm features.