Nanostructures of Sm-Co on Cr thin films
Nanostructures of Sm-Co on Cr thin films
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Cr 薄膜上 Sm-Co 的纳米结构
DOI：
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发表时间：
1994
期刊：
影响因子：
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通讯作者：
D. Sellmyer
中科院分区：
文献类型：
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作者：
Y. Liu;B. Robertson;Z. Shan;S. Malhotra;M. Yu;S. K. Renukunta;S. Liou;D. Sellmyer
采用高分辨透射电镜（HRTEM）和衍射技术研究了直流磁控溅射法制备的Sm-Co/Cr薄膜的纳米结构。高分辨透射电子显微镜（HRTEM）观察表明，Sm-Co薄膜中的晶粒在基体中呈不连续分布。基体是无定形的，如由显微衍射研究所示。微晶的尺寸在2/spl sim/5纳米的范围内。随着氩气压力从5 mTorr增加到30 mTorr，薄膜中微晶的体积分数从91%降低到54%。在明场透射电子显微镜（TEM）中记录的具有几微米散焦的显微照片揭示了在一些但不是所有膜中的约25 nm的颗粒状结构。这种晶粒结构被认为是从铬底层继承。>
The nanostructures of Sm-Co on Cr thin films prepared by dc magnetron sputtering were investigated by high resolution transmission electron microscopy (HRTEM) and diffraction techniques. HRTEM micrographs show that the crystallites in the Sm-Co films, as revealed by the lattice fringes, are distributed discontinuously in the matrix. The matrix is amorphous as indicated by the microdiffraction study. The size of the crystallites is in the range of 2/spl sim/5 nanometers. The volume fraction of the crystallites in the film decreases from 91% to 54% as the argon pressure is increased from 5 mTorr to 30 mTorr. Micrographs recorded in a bright field transmission electron microscope (TEM) with a defocus of a few micrometers reveal grain-like structures of about 25 nm in some but not all films. This grain-structure is found to be inherited from the Cr underlayer. >