Laser-induced forward transfer of focussed ion beam pre-machined donors
Laser-induced forward transfer of focussed ion beam pre-machined donors
复制标题
聚焦离子束预加工供体的激光诱导前向转移
DOI：
10.1016/j.apsusc.2011.02.094
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发表时间：
2011
期刊：
影响因子：
1.9
通讯作者：
R. Eason
中科院分区：
文献类型：
--
作者：
K. Kaur;M. Feinaeugle;D. Banks;J. Ou;F. Pietrantonio;E. Verona;C. Sones;R. Eason
本文报道了飞秒激光诱导预加工施主薄膜的前向转移(LIFT)。首先利用聚焦离子束技术加工了厚度为1μm、厚度达0.8μm的氧化锌薄膜，然后利用提升法从这些预先加工的施主中打印出边缘非常光滑、表面非常均匀的无碎屑的氧化锌微球。未加工的氧化锌施主薄膜和沉积在聚合物动态释放层(DRL)上的薄膜的打印结果也进行了比较，表明了可实现的优越转移质量和这种前加工技术的实用性。
In this paper we report femtosecond laser-induced forward transfer (LIFT) of pre-machined donor films. 1μm thick zinc oxide (ZnO) films were first machined using the focussed ion beam (FIB) technique up to a depth of 0.8μm. Debris-free micro-pellets of ZnO with extremely smooth edges and surface uniformity were subsequently printed from these pre-machined donors using LIFT. Printing results of non-machined ZnO donor films and films deposited on top of a polymer dynamic release layer (DRL) are also presented for comparison, indicating the superior quality of transfer achievable and utility of this pre-machining technique.