Diffraction efficiency of a grating coupler for an array illuminator.
Diffraction efficiency of a grating coupler for an array illuminator.
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阵列照明器光栅耦合器的衍射效率。
DOI：
10.1364/ao.35.003891
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发表时间：
1996
期刊：
影响因子：
1.9
通讯作者：
M. Takeda
中科院分区：
文献类型：
--
作者：
T. Nakaya;Y. Katoh;T. Kubota;M. Takeda
利用耦合波理论计算了带有表面浮雕光栅的光栅耦合器的衍射效率。制作了光栅耦合器，验证了计算结果的有效性。衍射效率随光栅耦合器槽深的变化规律与计算结果吻合较好。利用这些数值结果，设计和制造了发射10和20束等强度光束的阵列照明器。讨论了由衍射效率误差引起的输出光束均匀性误差。
The diffraction efficiency of a grating coupler having a surface-relief grating is calculated by the use of coupled-wave theory. The grating couplers are fabricated to examine the validity of the calculated result. The dependence of the measured diffraction efficiency on the groove depth of the grating coupler agrees well with the calculated results. The array illuminator, which emits 10 and 20 beams with equal intensity, is designed and fabricated through the use of these numerical results. The uniformity error of the output beam caused by the error of the diffraction efficiency is also discussed.