Characterization and operation of a mechanically actuated silicon microgripper

Characterization and operation of a mechanically actuated silicon microgripper
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机械驱动硅微夹具的表征和操作

DOI：
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
F. Grauvogel
F. Grauvogel
中科院分区：
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文献类型：
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作者：
M. Blideran;M. Fleischer;W. Henschel;D. Kern;Jochen Sterr;K. Schock;S. Kleindiek;M. Langer;K. Löffler;F. Grauvogel

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由于生物对象的操纵通常在维持生命的环境中进行，因此通过液体的电场或热梯度可能引起扰动。作者提出了一种微夹钳制造的硅体和表面微机械加工工艺相结合，具有几个优势相比，以前的报告。为了避免电场引起的任何可能的扰动，它们的微夹持器是机械驱动的。完整的系统，包括微夹钳，压电致动器，和nanomanipulator详细描述连同微米尺寸的玻璃球的操作。
Since the manipulation of biological objects is usually performed in a life-sustaining environment, electrical fields or thermal gradients through the liquid may cause perturbations. The authors present a microgripper fabricated in silicon by a combination of bulk and surface micromachining processes that exhibits several advantages compared to previous reports. In order to avoid any possible perturbation caused by electrical fields, their microgripper is mechanically actuated. The complete system including the microgripper, a piezoactuator, and a nanomanipulator is described in detail together with manipulation of micrometer sized glass spheres.