ϕ ( ρz ) Distributions in Bulk and Thin Film Samples for EPMA. Part 1: A Modified ϕ ( ρz ) Distribution for Bulk Materials, Including Characteristic and Bremsstrahlung Fluorescence
ϕ ( ρz ) Distributions in Bulk and Thin Film Samples for EPMA. Part 1: A Modified ϕ ( ρz ) Distribution for Bulk Materials, Including Characteristic and Bremsstrahlung Fluorescence
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EPMA 散装和薄膜样品中的 Ï ( Ïz ) 分布。
DOI：
10.1017/s1431927620024915
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发表时间：
2021
影响因子：
2.8
通讯作者：
Fournelle, John
中科院分区：
文献类型：
--
作者：
Moy, Aurélien;Fournelle, John
电子探针微区分析是一种广泛用于测定大块样品元素组成的无损分析技术。随着适当软件的开发，这一点扩展到了分层样品。传统的量化方法需要使用基于电离深度分布模型的矩阵校正过程，即所谓的ϕ(ρz)分布。这些模型中的大多数都导致了商业量化计划，但只有少数模型允许对分层样本进行量化。因此，我们开发了BadgerFilm，这是一个免费的开源薄膜程序，面向公众提供。该程序实现了记录在案的ϕ(ρz)模型以及计算块状和薄膜样品中荧光的算法。本工作的第一部分旨在描述所实现的ϕ(ρz)分布模型的操作，并通过大量样品的实验测量和蒙特卡罗模拟来验证其实现。该程序具有预测绝对X射线强度的能力，可以直接与蒙特卡罗模拟进行比较。我们证明了所实现的模型对大块材料非常有效。如第二部分所示，薄膜样品的BadgerFilm预测也与实验和蒙特卡罗结果很好地吻合。
Electron probe microanalysis is a nondestructive technique widely used to determine the elemental composition of bulk samples. This was extended to layered specimens, with the development of appropriate software. The traditional quantification method requires the use of matrix correction procedures based upon models of the ionization depth distribution, the so-calledϕ(ρz) distribution. Most of these models have led to commercial quantification programs but only few of them allow the quantification of layered specimens. Therefore, we developed BadgerFilm, a free open-source thin film program available to the general public. This program implements a documentedϕ(ρz) model as well as algorithms to calculate fluorescence in bulk and thin film samples. Part 1 of the present work aims at describing the operation of the implementedϕ(ρz) distribution model and validating its implementation against experimental measurements and Monte Carlo simulations on bulk samples. The program has the ability to predict absolute X-ray intensities that can be directly compared to Monte Carlo simulations. We demonstrate that the implemented model works very well for bulk materials. And as will be shown in Part 2, BadgerFilm predictions for thin film specimens are also shown to be in good agreements with experimental and Monte Carlo results.