Porous but Mechanically Robust All-Inorganic Antireflective Coatings Synthesized using Polymers of Intrinsic Microporosity
Porous but Mechanically Robust All-Inorganic Antireflective Coatings Synthesized using Polymers of Intrinsic Microporosity
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DOI：
10.1021/acsnano.2c05592
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发表时间：
2022-09-01
期刊：
影响因子：
17.1
通讯作者：
Shevchenko，Elena V.
中科院分区：
文献类型：
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作者：
Ji，Cheng;Zhang，Zhongbo;Shevchenko，Elena V.
在这里，我们引入聚合物的固有微孔1（PIM-1）设计的单层和多层的全无机增透膜（ARC）具有优异的机械性能。在顺序渗透合成（SIS）中使用PIM-1作为模板，我们可以制造高度均匀、机械稳定的AlOx保形涂层，其孔隙率为1.50%，折射率为1.41，而无孔AlOx的折射率为1.76，非常适合用于高端光学系统或触摸屏（例如，蓝宝石、导电玻璃、可弯曲玻璃等）。我们表明，这样的膜可以被用作单层ARC，能够减少蓝宝石的菲涅尔反射低至0.1%，在500 nm仅沉积在基板的一侧。我们还表明，沉积的第二层具有较高的孔隙率，使用嵌段共聚物，使梯度折射率的双层涂层的设计。仅具有两层且总厚度小于200 nm的AlOx结构能够在正常照明下将菲涅耳反射在宽光谱范围内减少到0.5%以下，在700 nm处具有0.1%的反射。此外，最重要的是，我们表明，高度多孔的单层和梯度折射率双层ARC的特点是高硬度和耐刮擦性。硬度和达到的最大载荷分别为7.5 GPa和13 mN，划痕深度约为130 nm，这是非常有前途的结构组成的两个多孔AlOx层与50%和85%的孔隙率，相应地。涂层的这种机械性能也可以允许它们作为其他光学涂层的保护层应用。
Here, we introduce polymer of intrinsic microporosity 1 (PIM-1) to design single-layer and multilayered all-inorganic antireflective coatings (ARCs) with excellent mechanical properties. Using PIM-1 as a template in sequential infiltration synthesis (SIS), we can fabricate highly uniform, mechanically stable conformal coatings of AlOxwith porosities of ∼50% and a refractive index of 1.41 compared to 1.76 for nonporous AlOxthat is perfectly suited for substrates commonly used in high-end optical systems or touch screens (e.g., sapphire, conductive glass, bendable glass, etc.). We show that such films can be used as a single-layer ARC capable of reduction of the Fresnel reflections of sapphire to as low as 0.1% at 500 nm being deposited only on one side of the substrate. We also demonstrate that deposition of the second layer with higher porosity using block copolymers enables the design of graded-index double-layered coatings. AlOxstructures with just two layers and a total thickness of less than 200 nm are capable of reduction of Fresnel reflections under normal illumination to below 0.5% in a broad spectral range with 0.1% reflection at 700 nm. Additionally, and most importantly, we show that highly porous single-layer and graded-index double-layered ARCs are characterized by high hardness and scratch resistivity. The hardness and the maximum reached load were 7.5 GPa and 13 mN with a scratch depth of about 130 nm, respectively, that is very promising for the structures consisting of two porous AlOxlayers with 50% and 85% porosities, correspondingly. Such mechanical properties of coatings can also allow their application as protective layers for other optical coatings.