Multiple replication of hierarchical structures from polymer masters with anisotropy
Multiple replication of hierarchical structures from polymer masters with anisotropy
复制标题
DOI：
10.1116/1.5120881
复制
发表时间：
2019-11-01
影响因子：
1.4
通讯作者：
Scheer, Hella-Christin
中科院分区：
文献类型：
--
作者：
Mayer, Andre;Rond, Johannes;Scheer, Hella-Christin
与原结构语气相同的结构副本要求至少进行双重复制。每个复制代都会因所用复制材料的固化或热收缩而收缩。通过模拟和实验对收缩的影响进行了基础研究。研究的主要复制材料是OrmoStamp和SU-8。目前，研究了具有层次结构的各向异性粘附元件的制备。这些结构是微米大小的隔离垫，上面有纳米大小的自排列波纹（激光诱导的周期性表面结构）。初始结构可作为硅上孤立的光刻胶图案。这种聚合物的双重复制引起了人们对其化学和机械稳定性的质疑。作者报告了一个优化的复制过程与OrmoStamp中间模板和弹性体的最终复制。通过实验验证了所制备的分层弹性粘接元件的各向异性。由AVS出版。
The copy of structures in the same tone as the original asks at least for a double replication. Each replication generation will suffer from shrinkage of the replication material used, due to curing or thermal contraction. The impact of shrinkage is addressed in a basic study by simulation and experiment. The main replication materials investigated are OrmoStamp and SU-8. Presently, the preparation of anisotropic adhesion elements with hierarchical structures is investigated. The structures are micrometer-sized isolated pads with nanometer-sized self-aligned ripples (laser-induced periodic surface structures) on top. The initial structures are available as isolated photoresist patterns on Si. The double replication of this polymeric master raises questions with respect to its chemical and mechanical stability. The authors report an optimized replication process with an OrmoStamp intermediate template and a final replication in an elastomer. The anisotropic character of the so prepared hierarchical elastomeric adhesion elements is demonstrated by measurement. Published by the AVS.