High-Speed High-Precision Control of Atomic Force Microscope by Surface Topography Learning Observer
High-Speed High-Precision Control of Atomic Force Microscope by Surface Topography Learning Observer
复制标题
表面形貌学习观测器对原子力显微镜的高速高精度控制
DOI:
--
复制
发表时间:
2009
期刊:
影响因子:
--
通讯作者:
Hiroshi Fujimoto
中科院分区:
文献类型:
--
作者:
Takayuki Shiraishi;Hiroshi Fujimoto