CRACKING EFFICIENCY OF HYDROGEN WITH TUNGSTEN FILAMENT IN MOLECULAR-BEAM EPITAXY
CRACKING EFFICIENCY OF HYDROGEN WITH TUNGSTEN FILAMENT IN MOLECULAR-BEAM EPITAXY
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DOI：
10.1143/jjap.34.l1379
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发表时间：
1995-10-15
期刊：
影响因子：
--
通讯作者：
KAWABE, M
中科院分区：
文献类型：
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作者：
SUTOH, A;OKADA, Y;KAWABE, M
在分子束外延（MBE）中，氢原子对半导体的生长有着重要的影响。在这项工作中，氢分子裂解成原子氢与热钨丝（W）的效率已被实验确定。氢原子在加热的铂探测器表面重新结合形成分子，释放出反应热，导致铂探测器温度升高，原子氢的裂解效率可以通过考虑原子化焓来确定。裂解效率随钨丝温度的升高呈指数增加。例如，在1600摄氏度的灯丝温度和1.5ccm的H-2气体流速下，裂解效率被确定为约1.5%或等效地，由裂解产生的氢原子数为2 × 10（16）cm（-2）。s（-1），Hz压力为1.87 x 10（-2）Pa。
Atomic hydrogen is known to exert various important effects on the growth of semiconductors in molecular beam epitaxy (MBE). In this work, the cracking efficiencies of hydrogen molecules into atomic hydrogen with a hot tungsten (W) filament have been experimentally determined. Hydrogen atoms recombine at the surface of a heated platinum detector to form molecules releasing the heat of reaction, which results in a temperature increase of the platinum detector, and the cracking efficiencies of atomic hydrogen can be determined by considering the enthalpy of atomization. The cracking efficiency increased exponentially with W filament temperature. At a filament temperature of 1600 degrees C and a H-2 gas flow rate of 1.5 ccm for example, the cracking efficiency was determined to be about 1.5% or equivalently, the number of hydrogen atoms resulting from cracking was 2 x 10(16) cm(-2) . s(-1) at a Hz pressure of 1.87 x 10(-2) Pa.