Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips
Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips
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DOI：
10.1063/1.3230500
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发表时间：
2009-07-01
期刊：
影响因子：
3.2
通讯作者：
Wen, Weijia
中科院分区：
文献类型：
--
作者：
Wang, Limu;Zhang, Mengying;Wen, Weijia
报道了一种可完全集成于聚二甲基硅氧烷（PDMS）中的新型微流控压力传感器。传感器直接产生电信号。我们将基于PDMS的导电复合材料集成到30 μ m厚的膜中，并将其粘合到微通道侧壁。该传感器的响应时间约为100 ms，可在0-100 kPa的压力范围内工作。这种微压传感器的分辨率通常为0.1kPa，但由于电阻和压力之间的二次关系，在高压下可以增加到0.01kPa。传感器基于PDMS的性质确保其与PDMS芯片的完美结合，并且传感器的标准光刻工艺允许一次性制造三维结构甚至微传感器阵列。理论计算与实验观测符合得很好。(C)2009年美国物理学会。[DOI：10.1063/1.3230500]
A novel microfluidic pressure sensor which can be fully integrated into polydimethylsiloxane (PDMS) is reported. The sensor produces electrical signals directly. We integrated PDMS-based conductive composites into a 30 mu m thick membrane and bonded it to the microchannel side wall. The response time of the sensor is approximately 100 ms and can work within a pressure range as wide as 0-100 kPa. The resolution of this micropressure sensor is generally 0.1 kPa but can be increased to 0.01 kPa at high pressures as a result of the quadratic relationship between resistance and pressure. The PDMS-based nature of the sensor ensures its perfect bonding with PDMS chips, and the standard photolithographic process of the sensor allows one-time fabrication of three dimensional structures or even microsensor arrays. The theoretical calculations are in good agreement with experimental observations. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3230500]