S. motojima; S. Kuri; T. Hattori: "Preparation and properties of cobalt silicides by diffusion and CVD processes using Si_2Cl_6 as a silicon source" J. Less-Common Met.124. 193-204 (1986)
S. motojima; S. Kuri; T. Hattori: "Preparation and properties of cobalt silicides by diffusion and CVD processes using Si_2Cl_6 as a silicon source" J. Less-Common Met.124. 193-204 (1986)
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