Microwave excitation of a low-energy atomic hydrogen
Microwave excitation of a low-energy atomic hydrogen
复制标题
低能原子氢的微波激发
DOI:
10.1088/1361-6595/ab5e60
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发表时间:
2020
影响因子:
3.8
通讯作者:
Wada Motoi
中科院分区:
文献类型:
--
作者:
Shimabukuro Yuji;Takahashi Hidenori;Iwamoto Shinichi;Tanaka Koichi;Wada Motoi
Performances of microwave driven compact neutral beam sources of different plasma excitation configurations have been compared in producing directed low energy atomic beams for biomolecular structural analyses. The beam sources include unique impedance matching systems in themselves for reducing the size of the source; a multi-turn spiral antenna successfully excited a hydrogen plasma in a 4 mm inner diameter Al 2 O 3 tube by 2.45 GHz microwave power. A combination of a mirror magnetic field and electron cyclotron resonance has been found effective to realize a source operation at a low operating pressure (∼ 10− 3 Pa). This magnetic field configuration produced a hydrogen plasma with the optical emission spectrum predominated by atomic lines indicating a high degree of dissociation. The plasma excited in this type of source exhibited a mode transition like behavior which was not confirmed in other source geometries.