Laser-diode-based pseudo-heterodyne interferometer for online process control of wire bonders
Laser-diode-based pseudo-heterodyne interferometer for online process control of wire bonders
复制标题
用于焊线机在线过程控制的基于激光二极管的伪外差干涉仪
DOI：
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复制
发表时间：
2000
期刊：
影响因子：
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通讯作者：
G. Siegmund
中科院分区：
文献类型：
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作者：
A. Lewin;F. Ritter;G. Siegmund
作为政府资助的多学科项目的一部分，已经开发了一种传感器，可以测量焊接尖端的超声波振幅。设计了一种可安装在旋转键合头上的光纤耦合微型测量头激光干涉仪。采用调制的可见光二极管激光器，根据伪外差原理产生方向敏感的多普勒信号。
As part of a government funded multidisciplinary project, a sensor has been developed to allow the measurement of the ultrasonic amplitude at the tip of the bonding too. A laser interferometer has been designed with a fiber coupled miniature measurement head which can be mounted on the rotating bond head. A modulated visible diode laser is employed to generate a direction-sensitive Doppler signal according to the pseudo-heterodyne principle.