Shape memory microvalves based on thin films or rolled sheets
Shape memory microvalves based on thin films or rolled sheets
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DOI：
10.1016/s0921-5093(99)00416-5
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发表时间：
1999-12-15
期刊：
影响因子：
6.4
通讯作者：
Allen, DM
中科院分区：
文献类型：
--
作者：
Kohl, M;Dittmann, D;Allen, DM
本文报道了微加工形状记忆合金（SMA）薄膜或薄片应力优化形状驱动气体微阀的最新发展。用溅射沉积法制备了10 μ m厚的Ti-Ni、Ti-Ni-Cu和Ti-Ni-Pd薄膜。用热锻和冷轧方法制备了30-100 μ m厚的Ti-Ni合金薄板。阀门的主要制造技术是激光切割或电解光刻以及随后的混合集成。通过改变薄膜的化学组成，将阀的工作温度调节在30至120摄氏度之间。薄膜装置已经在张力模式下操作，允许控制3000 hPa（3 bar）的最大压差。相应的最大气体流量约为360标准ccm。Ti-Ni-Cu和Ti-Ni微阀的最大控制功率为110 mW，Ti-Ni-Pd微阀的最大控制功率为220 mW。SMA片材微型器件已经在弯曲模式下操作，这允许大冲程，从而允许大的气体流量。(C)1999年Elsevier Science S.A. All rights reserved.
This paper reports on recent developments of gas microvalves, which are actuated by microfabricated shape memory alloy (SMA thin films or sheets with stress-optimised shapes. Ti-Ni, Ti-Ni-Cu and Ti-Ni-Pd thin films of 10 mu m thickness have been fabricated by sputter deposition. Ti-Ni sheets of 30-100 mu m thickness have been made by hot-forging and cold-rolling. The main fabrication technologies of the valves have been laser cutting or electrolytic photoetching and subsequent hybrid integration. By variation of the chemical composition of the thin films, the valve operation temperature was adjusted between 30 and 120 degrees C. The thin film devices have been operated in tension mode allowing the control of maximum pressure differences of 3000 hPa (3 bar). The corresponding maximum gas flow is about 360 Standard ccm. The maximum control power for Ti-Ni-Cu and Ti-Ni microvalves is 110 mW, for Ti-Ni-Pd microvalves 220 mW. SMA sheet microdevices have been operated in bending mode, which allows large strokes and thus large gas flows. (C) 1999 Elsevier Science S.A. All rights reserved.