Braille code display device with a PDMS membrane and thermopneumatic actuator
Braille code display device with a PDMS membrane and thermopneumatic actuator
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带有 PDMS 膜和热气动执行器的盲文代码显示装置
DOI：
10.1109/memsys.2008.4443709
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
Seung
中科院分区：
文献类型：
--
作者：
Hyuk‐Jun Kwon;Seok Woo Lee;Seung
制作并测试了一种由PDMS（聚二甲基硅氧烷）薄膜和热气动驱动器组成的盲文编码显示装置。通过使用RIE（反应离子蚀刻）、化学湿法蚀刻和电子束蒸发来制造盲文代码中的六个点中的尺寸为3mm × 3mm的一个点（像素）。当施加的输入电压低于6 VPP时，薄膜在硅衬底厚度以下发生偏转。另一方面，当在40 μ m和110 μ m厚度的膜上施加8 Vpp和10 Vpp时，发生约1 mm、0.4 mm、1. 3mm和1.4mm。所制造的装置的偏转完成超过2倍大于600 μ m的标准高度由韩国盲人联盟指定。
The Braille code display device with a PDMS (polydimethylsiloxane) membrane and thermopneumatic actuator is fabricated and tested. One dot (pixel) whose dimension is 3 mm x 3 mm among six dots in the Braille code is fabricated by using RIE (reactive ion etching), chemical wet etching, and E-beam evaporating. When applied input voltage is under 6 VPP, the deflections of the membranes occur under the thickness of the silicon substrate. On the other hand, when 8 Vpp and 10 Vpp are applied at 40 mum and 110 mum thickness membranes, the deflections happen about 1 mm, 0.4 mm, 1. 3 mm, and 1.4 mm over the substrate, respectively. The deflection of fabricated device is accomplished over 2 times larger than 600 mum standard height designated by Korea Blind Union.