Demonstration of Hybrid Silicon-on-Silicon Carbide Wafers and Electrical Test Structures with Improved Thermal Performance
Demonstration of Hybrid Silicon-on-Silicon Carbide Wafers and Electrical Test Structures with Improved Thermal Performance
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具有改进的热性能的混合碳化硅硅晶圆和电气测试结构的演示
DOI:
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发表时间:
2006
期刊:
影响因子:
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通讯作者:
Jeffrey T. Bernacki
中科院分区:
文献类型:
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作者:
S. Whipple;J. Torvik;R. Treece;Jeffrey T. Bernacki