1 GHz electro-optical silicon-germanium modulator in the 5-9 µm wavelength range.
1 GHz electro-optical silicon-germanium modulator in the 5-9 µm wavelength range.
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5-9 µm 波长范围内的 1GHz 电光硅-锗调制器。
DOI：
10.1364/oe.476164
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发表时间：
2022
期刊：
影响因子：
3.8
通讯作者：
D. Marris‐Morini
中科院分区：
文献类型：
--
作者：
T. Nguyen;Natnicha Koompai;Victor Turpaud;M. Montesinos;J. Peltier;J. Frigerio;A. Ballabio;Raffaele Giani;J. Coudevylle;C. Villebasse;D. Bouville;C. Alonso‐Ramos;L. Vivien;G. Isella;D. Marris‐Morini
中红外（mid-IR）波长范围内的光谱学是检测和识别化学和生物物质的关键技术。在这种情况下，集成光学系统的发展为实现紧凑且具有成本效益的传感系统铺平了道路。在所需的设备中，集成电光调制器（EOM）是利用双梳状光谱的先进传感电路的关键元件。在本文中，我们已经通过实验证明了一种在宽波长范围内工作的集成EOM，即在高达1 GHz的射频（RF）下从5 μ m到9 μm。 该调制器利用了渐变硅锗（SiGe）光子波导中嵌入的肖特基二极管中自由载流子吸收的变化。
Spectroscopy in the mid-infrared (mid-IR) wavelength range is a key technique to detect and identify chemical and biological substances. In this context, the development of integrated optics systems paves the way for the realization of compact and cost-effective sensing systems. Among the required devices, an integrated electro-optical modulator (EOM) is a key element for advanced sensing circuits exploiting dual comb spectroscopy. In this paper, we have experimentally demonstrated an integrated EOM operating in a wide wavelength range, i.e. from 5 to 9 µm at radio frequency (RF) as high as 1 GHz. The modulator exploits the variation of free carrier absorption in a Schottky diode embedded in a graded silicon germanium (SiGe) photonic waveguide.