Real-time observation on hot-filament-assisted CVD growth of graphene
Real-time observation on hot-filament-assisted CVD growth of graphene
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DOI：
10.7567/1347-4065/ab106f
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发表时间：
2019-07
影响因子：
1.5
通讯作者：
Takanobu Taira;T. Shinohara;Seiji Obata;K. Saiki
中科院分区：
文献类型：
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作者：
Takanobu Taira;T. Shinohara;Seiji Obata;K. Saiki
利用辐射模式光学显微镜(Rad-OM)研究了热丝对石墨烯化学气相沉积(CVD)生长的影响。研究发现，热丝对石墨烯的成核和生长有促进作用，并且随着热丝温度的升高，这种作用增强。在一定的成丝温度下，生长加速，但不发生添加剂成核。结果表明，在优化的灯丝温度下，热丝分解源气可以促进生长，抑制添加剂成核，有利于在短时间内合成大面积单晶石墨烯。
The effect of hot-filament on CVD growth of graphene was investigated using radiation-mode optical microscopy (Rad-OM), which we developed for the real-time observation of the CVD process of graphene. We found that the hot-filament induced nucleation and accelerated growth of graphene, the effects of which were enhanced by raising the filament temperature. At a certain filament temperature, growth was accelerated while no additive nucleation occurred. The present results suggest that decomposing source gas by hot-filament at optimized filament temperatures can accelerate growth while suppressing additive nucleation, which would be useful for synthesizing large-area single-crystalline graphene in a short time.