Schottky-type response of carbon nanotube NO2 gas sensor fabricated onto aluminum electrodes by dielectrophoresis

Schottky-type response of carbon nanotube NO2 gas sensor fabricated onto aluminum electrodes by dielectrophoresis
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DOI:
10.1016/j.snb.2005.08.043
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发表时间:
2006-04-26
影响因子:
8.4
通讯作者:
Hara, M
Hara, M
中科院分区:
化学1区
文献类型:
--
作者:
Suehiro, J;Imakiire, H;Hara, M

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采用介电泳法在Cr、Pd和Al微电极上制备了单壁碳纳米管(CNT)气敏元件,Al/CNT气敏元件对NO_2(二氧化氮)气体的响应特性是在NO_2暴露的瞬间电阻快速而大幅度地增加,而其它金属/CNT气敏元件的电阻单调地减小.结果表明,吸附的NO2分子可能会改变肖特基势垒在Al/CNT界面以及在p型半导体CNT的正空穴密度。Al/CNT传感器响应可以被解释为肖特基接触电阻和CNT电阻的叠加,其受到NO吸附的不同影响,并有助于整体传感器响应。Al/CNT传感器的肖特基响应比使用其他金属电极获得的CNT响应快大约一个数量级。(c)2005 Elsevier B. V.保留所有权利。
Single-walled carbon nanotube (CNT) gas sensors were fabricated by dielectrophoresis onto microelectrodes made of Cr, Pd or Al. The Al/CNT sensor response to NO, (nitrogen dioxide) gas was characterized by fast and large resistance increase at the moment of NO, exposure, whereas the resistance of the other metal/CNT sensors monotonously decreased. It was suggested that the adsorbed NO2 molecules might alter the Schottky barrier at the Al/CNT interface as well as the positive hole density in the p-type semiconducting CNT. The Al/CNT sensor response could be interpreted as a superposition of the Schottky contact resistance and the CNT resistance, which were differently influenced by the NO, adsorption and contributed to the overall sensor response. The Schottky response of the Al/CNT sensor was approximately one order of magnitude faster than the CNT response obtained using the other metal electrodes. (c) 2005 Elsevier B.V. All rights reserved.