A trial for a reliable shape measurement using interferometry and deflectometry
A trial for a reliable shape measurement using interferometry and deflectometry
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DOI：
10.1117/12.2060353
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发表时间：
2014-08
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影响因子：
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通讯作者：
R. Hanayama
中科院分区：
文献类型：
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作者：
R. Hanayama
相位测量偏折术是一种新兴的测量镜面复杂曲面的技术，如非球面和自由曲面。它以其宽的垂直尺度动态范围和应用范围而极具吸引力。由于它是一种基于梯度的表面轮廓术，我们必须对测量数据进行积分才能获得表面形状。这可能是准确性低的原因。另一方面，干涉测量法是精确且众所周知的用于精密形状测量的方法。在干涉测量中，原始测量数据是干涉信号的相位，它直接反映了目标的表面形状。然而，干涉法测量非球面、自由曲面和工业上常见的曲面精度太高。为了保证超精密测量的精度，可靠性是最重要的。可靠性可以通过交叉检查来保持。然后，我将提出测量方法，使用干涉仪和偏转法进行可靠的形状测量。在这个概念中，使用偏转测量法测量全局形状，使用干涉测量法测量平坦区域周围的局部形状。偏折测量的结果是全面的和精确的。但它包含了由于斜率积分的模糊性。在干涉测量中，只能测量一个小区域，该区域几乎平行于参考表面。但它是准确可靠的。为了将这两种结果联合收割机结合起来，它应该是全局的、精确的和可靠的测量。我将介绍干涉测量和偏折测量相结合的概念和一些初步的实验结果。
Phase measuring deflectometry is an emerging technique to measure specular complex surface, such as aspherical surface and free-form surface. It is very attractive for its wide dynamic range of vertical scale and application range. Because it is a gradient based surface profilometry, we have to integrate the measured data to get surface shape. It can be cause of low accuracy. On the other hand, interferometry is accurate and well-known method for precision shape measurement. In interferometry, the original measured data is phase of interference signal, which directly shows the surface shape of the target. However interferometry is too precise to measure aspherical surface, free-form surface and usual surface in common industry. To assure the accuracy in ultra-precision measurement, reliability is the most important thing. Reliability can be kept by cross-checking. Then I will propose measuring method using both interferometer and deflectometry for reliable shape measurement. In this concept, global shape is measured using deflectometry and local shape around flat area is measured using interferometry. The result of deflectometry is global and precise. But it include ambiguity due to slope integration. In interferometry, only a small area can be measured, which is almost parallel to the reference surface. But it is accurate and reliable. To combine both results, it should be global, precise and reliable measurement. I will present the concept of combination of interferometry and deflectometry and some preliminary experimental results.