Review of atom probe FIB-Based specimen preparation methods
Review of atom probe FIB-Based specimen preparation methods
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DOI：
10.1017/s1431927607070845
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发表时间：
2007-12-01
影响因子：
2.8
通讯作者：
Larson, David J.
中科院分区：
文献类型：
--
作者：
Miller, Michael K.;Russell, Kaye F.;Larson, David J.
几种基于FIB的方法，已开发出制造针形原子探针试样从各种试样的几何形状，和特定的网站区域进行了审查。这些方法使得能够表征电子器件结构。原子探针可用于量化镓注入的水平和范围，并已证明在研磨的最后阶段期间使用低加速电压可显著降低镓注入的程度。
Several FIB-based methods that have been developed to fabricate needle-shaped atom probe specimens from a variety of specimen geometries, and site-specific regions are reviewed. These methods have enabled electronic device structures to be characterized. The atom probe may be used to quantify the level and range of gallium implantation and has demonstrated that the use of low accelerating voltages during the final stages of milling can dramatically reduce the extent of gallium implantation.