Implantable multichannel electrode array based on SOI technology
Implantable multichannel electrode array based on SOI technology
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DOI：
10.1109/jmems.2003.809962
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发表时间：
2003-04-01
影响因子：
2.7
通讯作者：
Lee, LP
中科院分区：
文献类型：
--
作者：
Cheung, KC;Djupsund, K;Lee, LP
本工作提出了一种在轻掺杂单晶硅上制作植入式多电极阵列的新方法。这种阵列是电刺激和记录神经信号的基本工具。我们的新的微加工工艺，基于绝缘体上硅（SOI）技术，固有地具有良好的控制最终的探针厚度没有湿蚀刻。针杆长6mm，宽80 μ m。这里，探针的厚度25 μ m由SOI晶片上的器件层厚度限定。我们新的喷洒器流体通道，其具有沿其6 mm长度间隔沿着50 μ m的孔，允许用任何期望的神经递质或其他药物灌注大面积的组织。在这里制造的探针进行测试，在猫的初级视觉皮层，从相邻的神经元记录的数据被用来表征他们的方向调谐。喷头通道的特点，通过通道的流量是一个线性函数的施加压力。
This work presents a new method of fabricating implantable multielectrode arrays on lightly doped single-crystal silicon. Such arrays are essential tools for electrical stimulation and recording of nerve signals. Our new microfabrication process, based on silicon-on-insulator (SOI) technology, inherently has excellent control over the final probe thickness without wet etching. The needle shanks are 6 mm long and 80 mum wide. Here the thickness of the probe, 25 mum, is defined by the device layer thickness on the SOI wafer. Our new sprinkler fluidic channel, which has holes spaced 50 mum apart along its 6 mm length, permits the perfusion of a large area of tissue with any desired neurotransmitter or other drug. The probes fabricated here are tested in the cat primary visual cortex; data recorded from adjacent neurons was used to characterize their orientation tuning. The sprinkler channel was characterized, and flowrate through the channel is a linear function of the applied pressure.