Robust, efficient, micrometre-scale phase modulators at visible wavelengths
Robust, efficient, micrometre-scale phase modulators at visible wavelengths
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DOI：
10.1038/s41566-021-00891-y
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发表时间：
2021-11-22
期刊：
影响因子：
35
通讯作者：
Yu, Nanfang
中科院分区：
文献类型：
--
作者：
Liang, Guozhen;Huang, Heqing;Yu, Nanfang
介绍了一种基于绝热微环谐振器的可见光谱氮化硅热光相位调制器，该器件占地面积小，功耗低，在增强/虚拟现实护目镜、量子信息处理电路和光遗传学等领域具有潜在的应用前景。光学相位调制器是大规模集成可见光波长光子系统的关键，在许多新兴应用中具有广阔的应用前景。然而，目前的技术需要很大的器件面积以及高功耗或高驱动电压，从而限制了可见光集成光子电路中的有源元件数量。在这里，我们展示了基于绝热微环谐振器的可见光谱氮化硅热光相位调制器，与波导型相位调制器相比，它在器件占地面积和功耗方面都至少减少了一个数量级。微谐振器设计为在强过耦合状态下工作，提供1.6pi的相位调制，幅度变化最小，对应的调制损耗低至0.61dB。通过离域谐振模式，绝热微环表现出更好的抗制造变化的稳健性：与常规微环相比，将芯片上绝热微环的共振热光学对准到激光频率所需的功率不到三分之一。
Visible-spectrum silicon nitride thermo-optic phase modulators based on adiabatic micro-ring resonators with a small device footprint and low power consumption, of potential use for applications like augmented-/virtual-reality goggles, quantum information processing circuits and optogenetics, are presented.Optical phase modulators are essential to large-scale integrated photonic systems at visible wavelengths and are promising for many emerging applications. However, current technologies require large device footprints and either high power consumption or high drive voltages, limiting the number of active elements in a visible-spectrum integrated photonic circuit. Here, we demonstrate visible-spectrum silicon nitride thermo-optic phase modulators based on adiabatic micro-ring resonators that offer at least a one-order-of-magnitude reduction in both the device footprint and power consumption compared with waveguide phase modulators. Designed to operate in the strongly over-coupled regime, the micro-resonators provide 1.6 pi phase modulation with minimal amplitude variations, corresponding to modulation losses as small as 0.61 dB. By delocalizing the resonant mode, the adiabatic micro-rings exhibit improved robustness against fabrication variations: compared with regular micro-rings, less than one-third of the power is needed to thermo-optically align the resonances of the adiabatic micro-rings across the chip to the laser frequency.