Electron Probe Microanalysis of Thin Films and Multilayers Using the Computer Program XFILM
Electron Probe Microanalysis of Thin Films and Multilayers Using the Computer Program XFILM
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DOI：
10.1017/s1431927609991218
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发表时间：
2010-02-01
影响因子：
2.8
通讯作者：
Merlet, Claude
中科院分区：
文献类型：
--
作者：
Llovet, Xavier;Merlet, Claude
XFILM是一个计算机程序，用于通过电子探针显微分析确定基底和多层膜上薄膜的厚度和成分。在这项研究中，我们描述了在最新版本的XFILM中实现的X射线发射模型，并通过比较文献中提供的薄膜样品的测量和计算的k-比率来评估其可靠性。我们提出并讨论了XFILM的应用程序的例子，说明该程序的功能。
XFILM is a computer program for determining the thickness and composition of thin films on Substrates and multilayers by electron probe microanalysis. In this study, we describe the X-ray emission model implemented in the latest version of XFILM and assess its reliability by comparing measured and calculated k-ratios from thin-film samples available in the literature. We present and discuss examples of applications of XFILM that illustrate the capabilities of the program.