Development of Pressure Sensitive Molecular Film as a Measurement Technique for Micro-and Nano-devices
Development of Pressure Sensitive Molecular Film as a Measurement Technique for Micro-and Nano-devices
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DOI：
10.1109/mhs.2006.320288
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发表时间：
2006-12
期刊：
影响因子：
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通讯作者：
H. Mori;Y. Matsuda;T. Niimi;H. Uenishi;Y. Sakazaki
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文献类型：
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作者：
H. Mori;Y. Matsuda;T. Niimi;H. Uenishi;Y. Sakazaki
具有高Knudsen数的微纳米系统中的气体流动必须被视为分子流动，而微纳米系统中热流体现象的实验分析需要采用“分子传感器”的测量技术。然而，与用于数值分析的分子模拟技术相比，这种测量技术的发展滞后。压敏涂料（PSP）技术是基于氧分子与发光分子的相互作用，似乎适合分析高克努森数流，这需要在分子水平上的诊断工具。在这项研究中，我们基于PSP技术和Langmuir-Blodgett （LB）膜技术制备了非常小厚度的压敏分子膜（PSMF）。结果表明，以钯（II）介卟啉IX （PdMP）为发光团，花生四烯酸为缓冲剂的PSMF在高Knudsen数的低压状态下具有与传统PSPs相当的压力敏感性，即使PSMF层中发光分子的数量远小于传统PSPs。结果表明，PSMF技术在高克努森数流（如微流）压力测量中是可行的
Gas flows in micro- and nano-systems having high Knudsen number must be treated as molecular flows, and experimental analyses of thermo-fluid phenomena in micro- and nano-systems need measurement techniques employing "molecular sensors". However, such measurement techniques are behind in development compared with molecular simulation techniques for numerical analyses. Pressure sensitive paint (PSP) technique is based on the interaction of oxygen molecules with luminescent molecules, and it seems suitable for analyses of high Knudsen number flows, which require diagnostic tools in the molecular level. In this study, we fabricate pressure sensitive molecular films (PSMF) with very small thickness based on the PSP technique and the Langmuir-Blodgett (LB) film technique. It is clarified that the PSMF composed of palladium (II) mesoporphyrin IX (PdMP) as a luminophore and arachidic acid as a buffer has comparable pressure sensitivity with conventional PSPs in low pressure regime with high Knudsen number, even if the amount of the luminescent molecules in the PSMF layer is much smaller than that in conventional PSPs. The results indicate the feasibility of PSMF technique for pressure measurement in high Knudsen number flows such as micro flows