Fabrication of miniature Clark oxygen sensor integrated with microstructure
Fabrication of miniature Clark oxygen sensor integrated with microstructure
复制标题
DOI：
10.1016/j.snb.2005.02.014
复制
发表时间：
2005-10
影响因子：
8.4
通讯作者：
Ching-Chou Wu;T. Yasukawa;H. Shiku;T. Matsue
中科院分区：
文献类型：
--
作者：
Ching-Chou Wu;T. Yasukawa;H. Shiku;T. Matsue
利用一种新的制造技术，将微型克拉克型氧传感器与微结构集成在一起。氧芯片由三电极结构的玻璃基板和聚二甲基硅氧烷(PDMS)容器组成，三电极结构的玻璃基板通过凹槽分开和连接，聚二甲基硅氧烷(PDMS)容器带有固定的PDMS透氧膜。不同衬底的组装仅采用O2等离子体键合技术，制作温度不超过95°C。该微型传感器的特点是最快的响应时间为6.8s，良好的线性相关系数为0.995，长寿命至少60h。目前的微型克拉克氧传感器可以很容易地与微流控系统集成，形成μ-TAS。
A miniature Clark-type oxygen sensor has been integrated with a microstructure using a novel fabrication technique. The oxygen chip consists of a glass substrate with a three-electrode configuration, which is separated and connected by a groove, and a poly(dimethylsiloxane) (PDMS) container with an immobilized PDMS oxygen-permeable membrane. The assembly of the different substrates only uses the O2plasma bonding technique, and the fabrication temperatures do not exceed 95°C. Characteristics of the miniature sensor include the fastest response time of 6.8s, good linearity with a correlation coefficient of 0.995, and a long lifetime of at least 60h. The present miniature Clark oxygen sensor can be readily integrated with a microfluidic system to form a μ-TAS.