X-ray phase-contrast imaging with submicron resolution by using extremely asymmetric Bragg diffractions
X-ray phase-contrast imaging with submicron resolution by using extremely asymmetric Bragg diffractions
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DOI：
10.1063/1.1337621
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发表时间：
2001
影响因子：
4
通讯作者：
Kenji K. Kobayashi;K. Izumi;H. Kimura;S. Kimura;Takashi Ibuki;Y. Yokoyama;Y. Tsusaka;Y. Kagoshima;J. Matsui
中科院分区：
文献类型：
--
作者：
Kenji K. Kobayashi;K. Izumi;H. Kimura;S. Kimura;Takashi Ibuki;Y. Yokoyama;Y. Tsusaka;Y. Kagoshima;J. Matsui
在全反射临界角附近利用极不对称的Si 111 Bragg衍射获得了高空间分辨率的x射线相衬图像。x射线图像在垂直和水平方向上都可以放大到294倍。利用该x射线显微系统，我们观察到0.7 μm宽的金线图案清晰的相衬图像。
We have obtained x-ray phase-contrast images with high spatial resolution by using extremely asymmetric Si 111 Bragg diffractions near the critical angle of the total reflection. The x-rayimage could be magnified to 294 times in both vertical and horizontal directions. By using this x-ray microscopy system, we have observed clear phase-contrast images of a 0.7-μm-wide gold-line pattern.