Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
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DOI：
10.1016/j.sna.2006.03.035
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发表时间：
2007-01-08
影响因子：
4.6
通讯作者：
Whatmore, Roger W.
中科院分区：
文献类型：
--
作者：
Duval, Fabrice F. C.;Wilson, Stephen A.;Whatmore, Roger W.
This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d(31,f) of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 mu m long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film. (c) 2006 Elsevier B.V All rights reserved.
