Si0.97Ge0.03 microelectronic thermoelectric generators with high power and voltage densities
Si0.97Ge0.03 microelectronic thermoelectric generators with high power and voltage densities
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DOI：
10.1038/s41467-020-18122-3
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发表时间：
2020-08-31
影响因子：
16.6
通讯作者：
Lee, Mark
中科院分区：
文献类型：
--
作者：
Dhawan, Ruchika;Madusanka, Prabuddha;Lee, Mark
微电子热电发电机是为能源自主电子设备充电的一种潜在解决方案，例如物联网传感器，这些设备必须携带自己的电源。然而，由高热电品质因数材料制成的芯片上集成所需面积为mm(2)的热电发电机无法产生使用普通温差运行硅电子产品所需的电压和功率水平。我们介绍了使用标准硅工艺制造的Si0.97Ge0.03的微电子温差发电机，具有与使用高优值系数材料的发电机相当或更好的高电压和发电密度。这些硅基热电发电机具有
Microelectronic thermoelectric generators are one potential solution to energizing energy autonomous electronics, such as internet-of-things sensors, that must carry their own power source. However, thermoelectric generators with the mm(2) footprint area necessary for on-chip integration made from high thermoelectric figure-of-merit materials have been unable to produce the voltage and power levels required to run Si electronics using common temperature differences. We present microelectronic thermoelectric generators using Si0.97Ge0.03, made by standard Si processing, with high voltage and power generation densities that are comparable to or better than generators using high figure-of-merit materials. These Si-based thermoelectric generators have