Effects of post-annealed floating gate on the performance of AlGaN/GaN heterostructure field-effect transistors

Effects of post-annealed floating gate on the performance of AlGaN/GaN heterostructure field-effect transistors
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退火后浮栅对AlGaN/GaN异质结构场效应晶体管性能的影响

DOI:
10.1088/1674-1056/26/12/127102
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发表时间:
2017
期刊:
影响因子:
1.7
通讯作者:
Yuanjie Lv
Yuanjie Lv
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Peng Cui;Zhaojun Lin;Chen Fu;Yan Liu;Yuanjie Lv

文献摘要

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制作了不同浮栅长度和不同退火温度的AlGaN/GaN异质结场效应晶体管。利用测量的AlGaN栅肖特基接触的电容-电压曲线,
AlGaN/GaN heterostructure field-effect transistors (HFETs) with different floating gate lengths and floating gates annealed at different temperatures, are fabricated. Using the measured capacitance–voltage curves of the gate Shottky contacts for the AlGaN