RF integrated magnetic thin film noise suppressor on coplanar transmission line
RF integrated magnetic thin film noise suppressor on coplanar transmission line
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共面传输线上的射频集成磁性薄膜噪声抑制器
DOI：
10.1002/pssb.200304561
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发表时间：
2004
期刊：
影响因子：
--
通讯作者：
M. Yamaguchi
中科院分区：
文献类型：
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作者：
Ki Hyeon Kim;M. Yamaguchi
RF集成噪声抑制器是通过使用微光刻工艺集成磁性膜来制造的。将不同尺寸的CoNbZr磁性薄膜堆叠在共面传输线上。射频噪声抑制器由磁性薄膜（CoNbZr）/聚酰亚胺/铜传输线/种子层（Ti/Cu）/玻璃衬底组成。采用射频溅射法制备了CoNbZr磁性薄膜（4πMs = 10 kG，Hk = 8.5 Oe，ρ = 120 μΩ cm，fFMR = 0.8 GHz）。通过从高达20 GHz的网络分析仪中提取S参数（S11，S21）来估计传输线的信号衰减。在2000 μm宽、15 mm长、2 μm厚的磁性薄膜情况下，与无磁性薄膜的共面传输线相比，谐振点处的信号衰减幅度大大增加，约为-56 dB。在50 μm宽、15 mm长、2 μm厚的磁性薄膜中，插入损耗和功率损耗（谐振频率区除外）与2000 μm宽的磁性薄膜相比非常小。这些结果与50 μm宽信号线的共面传输线上的磁膜尺寸引起的铁磁谐振和涡流损耗有关。（© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA，魏因海姆）
Rf integrated noise suppressors were fabricated by integration of magnetic films using a micro‐lithography process. CoNbZr magnetic films with various dimensions were stacked on coplanar transmission lines. The rf noise suppressor was composed of magnetic film (CoNbZr)/polyimide/Cu transmission line/seed layer (Ti/Cu)/glass substrate. The CoNbZr magnetic films (4πMs ∼ 10 kG, Hk = 8.5 Oe, ρ = 120 μΩ cm, fFMR = 0.8 GHz) were deposited by rf sputtering. The signal attenuation of the transmission line was estimated by extracting S‐parameters (S11, S21) from a network analyser up to 20 GHz. In the case of 2000 μm wide, 15 mm long and 2 μm thick magnetic films, the magnitude of signal attenuation at the resonance (dip) point was increased greatly to about –56 dB compared with a coplanar transmission line without magnetic film. In the case of 50 μm wide, 15 mm long and 2 μm thick magnetic films, insertion loss and power loss except for the resonance frequency region was very small in comparison with that of 2000 μm wide magnetic films. These results are related to the ferromagnetic resonance and eddy current loss due to the dimension of the magnetic film on the coplanar transmission line with the 50 μm wide signal line. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
纳米颗粒磁性薄膜在GHz频率下的噪声抑制效果
DOI：
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发表时间：
2004
期刊：
Transactions of the Materials Research Society of Japan 29
影响因子：
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作者：
S.Ohnuma;H.Nagura;T.Iwasa;H.Fujimori;T.Masumoto
通讯作者：
T.Masumoto