The application of thick-film technology in C-MEMS
The application of thick-film technology in C-MEMS
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DOI：
10.1007/s10832-007-9064-z
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发表时间：
2007-12-01
影响因子：
1.7
通讯作者：
Pavlin, Marko
中科院分区：
文献类型：
--
作者：
Belavic, Darko;Hrovat, Marko;Pavlin, Marko
利用低温共烧陶瓷（LTCC）技术制备的三维叠层结构在陶瓷微机电系统（C-MEMS）中具有实用价值。用于机械量的传感器和/或致动器是MEMS的基本部分。厚膜电阻器可用于感测机械变形，并且厚膜压电材料可用作C-MEMS结构中的机电换能器。这些厚膜材料在LTCC基板上的集成在某些情况下由于与相当玻璃化的LTCC基板的相互作用而难以实现。我们的工作的主题是调查的厚膜材料的机电换能器（传感器和执行器）和他们的兼容性LTCC基板。用商业厚膜电阻材料制成的电阻器用作LTCC基板上的传感器进行了研究和评估。铁电陶瓷材料的基础上的固溶体的锆钛酸铅（PZT）与低烧成温度约850摄氏度的厚膜技术和LTCC基板上进行了评估。
Laminated 3D structures made using low-temperature co-fired ceramic (LTCC) technology are practical for ceramic micro-electro-mechanical systems (C-MEMS). The sensors for mechanical quantities, and/or actuators, are fundamental parts of MEMS. Thick-film resistors can be used to sense the mechanical deformations, and thick-film piezoelectric materials can be used as electro-mechanical transducers in a C-MEMS structure. The integration of these thick-film materials on LTCC substrates is in some cases difficult to realise due to interactions with the rather glassy LTCC substrates. The subject of our work is an investigation of thick-film materials for electro-mechanical transducers (sensors and actuators) and their compatibility with LTCC substrates. Resistors made with commercial thick-film resistor materials for use as sensors on LTCC substrates have been investigated and evaluated. Ferroelectric ceramic materials based on solid solutions of lead zirconate titanate (PZT) with low firing temperatures around 850 degrees C were developed for thick-film technology and evaluated on LTCC substrates.