Fabrication and test of a MEMS combustor and reciprocating device
Fabrication and test of a MEMS combustor and reciprocating device
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MEMS燃烧器及往复装置的制作与测试
DOI：
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发表时间：
2002
期刊：
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通讯作者：
E. Yoon
中科院分区：
文献类型：
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作者：
D. Lee;D. Park;J. Yoon;Sejin Kwon;E. Yoon
我们提出了一个微机电系统（MEMS）规模的往复式装置的概念，由燃烧气体供电，我们已经制作了它的原型，以探讨在微型发电机的概念的适用性。在这项调查中，在一个微型燃烧室的研究，利用热力学原理，估计理论功率输出。我们已经进行了相关的子系统和制造工艺的评估，以实现在这样一个小规模的热机类似的设备的进一步发展。自行搭建了变深度微型燃烧室，在小体积内进行了燃烧特性测试。测量包括点火后的压力过渡和高速火焰可视化。测试条件包括火焰熄灭距离附近的燃烧室深度，低于该深度，燃烧理论预测不会燃烧。通过对测量数据的分析，得到了燃烧效率和有效功，并用于往复式MEMS装置的设计。燃烧测量的结果要求燃烧室高度为1 mm或更高，以实现稳定的点火和火焰传播。基于微燃烧实验的这些发现，我们制定了MEMS制造工艺，并制作了往复装置。该装置的燃烧室容积为1 mm3，圆柱体的横截面为高1 mm、宽2 mm的矩形，结构材料选用光敏玻璃。一个厚的光刻胶模具和电镀用于构建整体结构。用高速数字摄像机记录了以氢为燃料的单冲程实验，显示了活塞在合理速度下的位移。
We propose the concept of a microelectromechanical system (MEMS) scale reciprocating device powered by burnt gas and we have fabricated its prototype to investigate the applicability of the concept in a microscale power generator. In this investigation, combustion in a microscale chamber was studied using thermodynamic principles to estimate theoretical power output. We have carried out an evaluation of relevant subsystems and fabrication processes to realize the heat engine in such a small scale for further development of similar devices. A variable depth microcombustion chamber was built in-house to test the combustion characteristics in a small volume. Measurements include pressure transition after ignition and high-speed flame visualization. Test conditions include combustion chamber depth around the flame quenching distance, below which combustion theory predicts no burning. By analyzing the measured data, the combustion efficiency and available work were obtained and used for the design of a reciprocating MEMS device. The results of the combustion measurements required that the chamber height be 1 mm or more for stable ignition and flame propagation. Based on these findings of the microcombustion experiment, we formulated a MEMS fabrication process and made a reciprocating device. The device has a combustion chamber with a volume of 1 mm3, and the cross section of the cylinder has a rectangular shape with a height of 1 mm and a width of 2 mm. Photosensitive glass was chosen as a structural material. A thick photoresist mold and electroplating were used for constructing the overall structure. A single stroke experiment with hydrogen as a fuel was recorded by a high-speed digital video camera showing piston displacement at reasonable speeds.