The properties of Al doped ZnO thin films deposited on various substrate materials by RF magnetron sputtering
The properties of Al doped ZnO thin films deposited on various substrate materials by RF magnetron sputtering
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DOI：
10.1007/s10854-012-0632-x
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发表时间：
2012-02
期刊：
影响因子：
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通讯作者：
Xiaojing Wang;Xiangbin Zeng;Diqiu Huang;Xiao Zhang;Qing Li
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文献类型：
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作者：
Xiaojing Wang;Xiangbin Zeng;Diqiu Huang;Xiao Zhang;Qing Li
采用射频磁控溅射的方法，在玻璃、聚酰亚胺薄膜（PI）和不锈钢等基材上沉积了透明导电掺铝ZnO （AZO）薄膜。系统地研究了在不同衬底上生长的AZO薄膜的结构、电学和光学性质。我们观察到衬底材料对薄膜结晶和电阻率有重要影响，但对透光率影响不大。x射线衍射研究表明，所制备的AZO薄膜均具有高c轴择优取向的纤锌矿相，且在玻璃上的薄膜呈现最强的（002）衍射峰。压缩应力的存在对AZO薄膜的晶体结构起着决定性的作用，压缩应力的存在使AZO薄膜的晶格常数拉长，（002）衍射角增大。虽然玻璃上的薄膜电性能最好，电阻率达到12.52 × 10-4 Ωm，但AFM研究表明，柔性基板上的薄膜，特别是不锈钢上的薄膜具有类似的倒金字塔结构，适用于太阳能电池的窗口材料和电极。在400 ~ 800 nm可见光范围内，沉积在玻璃和PI上的AZO薄膜的平均透过率均在85%左右。
Transparent conductive Al-doped ZnO (AZO) thin films were deposited on various substrates including glass, polyimide film (PI) and stainless steel, using radio frequency magnetron sputtering method. The structural, electrical and optical properties of AZO thin films grown on various substrates were systematically investigated. We observe that substrate materials play important roles in film crystallization and resistivity but little on optical transmittance. X-ray diffractometer study shows that all obtained AZO thin films have wurtzite phase with highly c-axis preferred orientation, and films on glass present the strongest (002) diffraction peaks. The presence of compression stress plays critical role in determining the crystalline structure of AZO films, which tends to stretch the lattice constantcand enlarge the (002) diffraction angle. Although the films on the glass present the finest electrical properties and the resistivity reaches 12.52 × 10-4 Ωm, AFM study manifests that films on flexible substrates, especially stainless steel, bestrew similar inverted pyramid structure which are suitable for window material and electrode of solar cells. The average optical transmittance of AZO thin films deposited on glass and PI are both around 85% in the visible light range (400–800 nm).