Modelling and testing of a piezoelectric ultrasonic micro-motor suitable for in vivo micro-robotic applications
Modelling and testing of a piezoelectric ultrasonic micro-motor suitable for in vivo micro-robotic applications
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DOI：
10.1088/0960-1317/20/11/115018
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发表时间：
2010-11-01
影响因子：
2.3
通讯作者：
Yeo, L.
中科院分区：
文献类型：
--
作者：
Watson, B.;Friend, J.;Yeo, L.
研制了一种定子直径为241 μ m、外径为400 μ m的压电超声谐振式微电机。电机的起动转矩为1.2 nN·m-1，最大输出功率为0.25 μ W，预紧力为46.6 μ N。预载荷增加到2264 μ N，性能提高到29 nNm的启动扭矩和9.1 μ W的峰值输出功率。该电机比Kanda等人生产的目前最小的压电超声谐振电机小五倍。该电机的设计工作频率约为771 kHz，与基本轴向、二次谐波扭转和机电谐振频率相匹配。这是通过使用一种新颖的设计过程来实现的，该设计过程使用缩放理论来大大减少设计器件的计算时间。由此产生的电机的尺寸和性能使其成为第一个电机设计能够满足在体内的无绳游泳微型机器人的驱动系统的要求。
A piezoelectric ultrasonic resonant micro-motor is developed with a stator diameter of 241 mu m and an overall diameter of 400 mu m. The motor is shown to produce a start-up torque of 1.2 nN m and a peak output power of 0.25 mu W as designed, with a preload of 46.6 mu N. An increase in preload to 2264 mu N improved the performance to a start-up torque of 29 nN m and a peak output power of 9.1 mu W. The motor is five times smaller than the current smallest piezoelectric ultrasonic resonant motor produced by Kanda et al. The motor is designed to operate at approximately 771 kHz, matching the fundamental axial, second harmonic torsional and electro-mechanical resonant frequencies. This is achieved through the use of a novel design process that uses scaling theories to greatly reduce the computational time to design the device. The resultant size and performance of the motor make it the first motor design capable of meeting the requirements of a drive system in a tetherless swimming in vivo micro-robot.