Influence of optical aberrations on the peak extraction in confocal microscopy
Influence of optical aberrations on the peak extraction in confocal microscopy
复制标题
光学像差对共焦显微镜中峰提取的影响
DOI：
10.1016/j.optcom.2019.04.081
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发表时间：
2019
影响因子：
2.4
通讯作者：
Jiang Xiangqian Jane
中科院分区：
文献类型：
--
作者：
Chen Cheng;Wang Jian;Zhang Chi;Lu Wenlong;Liu Xiaojun;Lei Zili;Yang Wenjun;Jiang Xiangqian Jane
轴向响应信号（ARS）的峰定位是共聚焦显微镜高度提取的关键。在以往的峰定位评价中，对无像差共聚焦系统的分析一般考虑随机噪声和样品表面高度的综合影响。本文通过蒙特卡罗模拟，评估了光学像差、随机噪声和样本表面高度对峰提取的综合影响。首先，在ARS模型中加入一定的光学像差。然后分析了系统峰提取误差和标准差。最后，对无像差和有像差的共焦系统进行了比较。仿真结果表明，光像差是影响峰提取计算精度和准确度的重要因素。更具体地说，像差引起的ARS不对称超过一定限度将导致系统峰提取误差和标准差的极大增加。本文提出的“不对称度”度量可以为共聚焦测量中像差容差的确定提供参考，并为进一步提高共聚焦显微镜的性能提供指导。
The peak localization of axial response signal (ARS) is essential for height extraction in confocal microscopy. In previous evaluations about peak localization, an aberration-free confocal system was generally analyzed by taking the comprehensive effects of random noise and sample surface height into consideration. In this paper, the combined influence of optical aberration, random noise and sample surface height on peak extraction are evaluated using Monte Carlo simulations. At first, a certain amount of optical aberration is added into the ARS model. Then the systematic peak extraction error and standard deviation are analyzed. In the end, comparisons are provided between an aberration-free and an aberrated confocal system. Our simulations demonstrate that optical aberration is a critical influencing factor in peak extraction computation in terms of both accuracy and precision. More specifically, aberration-induced asymmetry of ARS that exceeds certain limits will result in a tremendous increase in systematic peak extraction error and standard deviation. Our developed metric “degree of asymmetry” can offer a reference for determining the aberration tolerance in confocal metrology and acting as guides for further performance enhancement of confocal microscopy.