Fabrication of OMT-Coupled Kinetic Inductance Detector for CMB Detection
Fabrication of OMT-Coupled Kinetic Inductance Detector for CMB Detection
复制标题
用于 CMB 检测的 OMT 耦合动感电感探测器的制作
DOI：
10.1007/s10909-020-02341-5
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发表时间：
2020
影响因子：
2
通讯作者：
E. Shirokoff
中科院分区：
文献类型：
--
作者：
Q. Y. Tang;P. Barry;T. Cecil;E. Shirokoff
未来的宇宙微波背景（CMB）实验，包括大规模地基第四阶段CMB实验（CMB-S4），卫星和气球，旨在以前所未有的精度绘制CMB，以回答宇宙学中的几个关键问题。然而，为了达到目标噪声灵敏度，将需要超过100，000个探测器。动态电感检测器（KID）阵列是一个很有前途的替代实验，需要大量的检测器，由于固有的多路复用能力。我们提出了一个原型平面正交模换能器（OMT）耦合多色KID阵列优化为220/270 GHz频段的制造过程。这些器件由绝缘体上硅晶片制成，为KID提供低损耗衬底。OMT将来自宽带喇叭天线的两种偏振的光耦合到单独的Nb/SiN/Nb微带线，然后将其耦合到Al/Nb集总元件KID（LEKID）。使用深反应离子蚀刻将OMT背面的硅蚀刻掉，以释放OMT膜，从而能够在宽带宽上操作。最后，去除KID电容器下方的掩埋氧化物，以最大限度地降低两级系统噪声和损耗。我们在原型器件上实现了良好的产率（> 80%）。
Future cosmic microwave background (CMB) experiments, including the large scale ground-based Stage Four CMB Experiment (CMB-S4), satellites, and balloons, aim to map the CMB to an unprecedented precision in order to answer several key questions in cosmology. However, to reach the target noise sensitivity, more than 100,000 detectors will be needed. Arrays of kinetic inductance detectors (KIDs) are a promising alternative for experiments that require large number of detectors due to the intrinsic multiplexing capabilities. We present the fabrication procedure for a prototype planar orthomode transducer (OMT)-coupled multi-color KID array optimized for 220/270 GHz frequency bands. These devices are made from silicon-on-insulator wafers to provide a low-loss substrate for the KIDs. The OMT couples the two polarizations of light from a wide-band feedhorn to separate Nb/SiN/Nb microstrip lines, which are then coupled to Al/Nb lumped-element KIDs (LEKIDs). The silicon on the backside of the OMT is etched away using deep reactive ion etch to release the OMT membrane to enable operation over a wide bandwidth. Finally, the buried oxide is removed underneath the KID capacitors in order to minimize two-level system noise and loss mitigation. We achieved a good yield (> 80%) on our prototype devices.
天线耦合集总元件动感检测器的设计和性能
影响因子：
2
作者：
Barry P
通讯作者：
Barry P
30 米 IRAM 望远镜上的 NIKA2 仪器：性能和结果
影响因子：
2
作者：
Catalano A
通讯作者：
Catalano A
偏振敏感多色 MKID
DOI：
10.1117/12.2233243
发表时间：
2016
期刊：
SPIE Proceedings
影响因子：
--
作者：
Johnson, Bradley R.;Flanigan, Daniel;Abitbol, Maximilian H.;Ade, Peter A.;Bryan, Sean;Cho, Hsiao-Mei;Datta, Rahul;Day, Peter;Doyle, Simon;Irwin, Kent
通讯作者：
Irwin, Kent