Electrical and Optical Properties of In2O3–ZnO Films Deposited on Polyethylene Terephthalate Substrates by Radio Frequency Magnetron Sputtering
Electrical and Optical Properties of In2O3–ZnO Films Deposited on Polyethylene Terephthalate Substrates by Radio Frequency Magnetron Sputtering
复制标题
射频磁控溅射在聚对苯二甲酸乙二醇酯基底上沉积 In2O3-ZnO 薄膜的电学和光学性能
DOI：
10.1143/jjap.42.223
复制
发表时间：
2003
影响因子：
1.5
通讯作者：
K. Je
中科院分区：
文献类型：
--
作者：
Hwa;Sangeun Jung;J. Ahn;Y. Kang;K. Je
以In_2O_3和ZnO粉末的质量比为95：5的混合物为靶材，采用射频磁控溅射法在聚对苯二甲酸乙二醇酯（PET）衬底上制备了高透明导电氧化物（TCO）薄膜。这些薄膜具有无定形结构，具有优异的电稳定性、表面均匀性和对PET基底的粘附性，并且可以在室温下制备。特别地，与沉积在PET的硬涂层上的那些相比，直接沉积在PET上而没有硬涂层的In 2 O3-ZnO（IZO）膜具有几乎相似的电学性质、更高的透射率和更均匀的表面。当在PET上沉积TCO材料时，IZO在光学、电学和蚀刻性能及其表面均匀性等多个方面比氧化铟锡（ITO）更合适。
Using a In2O3 and ZnO powder mixture with a ratio of 95:5 in wt% as a target, highly transparent conducting oxide (TCO) films are prepared on polyethylene terephthalate (PET) substrates by rf-magnetron sputtering. These films have amorphous structures with excellent electrical stability, surface uniformity and adhesion to the PET substrate and can be prepared at room temperature. In particular, In2O3–ZnO (IZO) films directly deposited on PET without a hard-coated layer have nearly similar electrical properties, higher transmittance and a more uniform surface in comparison with those deposited on a hard-coated layer of PET. When a TCO material is deposited on PET, IZO is more suitable than indium tin oxide (ITO) in several aspects such as the optical, electrical, and etching properties and its surface uniformity.