Residual layer thickness in nanoimprint: Experiments and coarse-grain simulation
Residual layer thickness in nanoimprint: Experiments and coarse-grain simulation
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DOI：
10.1016/j.mee.2007.12.041
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发表时间：
2008-05-01
影响因子：
2.3
通讯作者：
Zaitsev, Sergey
中科院分区：
文献类型：
--
作者：
Kehagias, Nikolaos;Reboud, Vincent;Zaitsev, Sergey
提出了一种同时计算纳米压印光刻中抗蚀剂粘性流动和印模/基片变形的精细粗粒方法。该方法已实现在一个有效的模拟工具，在标准的个人计算机上验证的邮票结构，通过使用GDS数据的邮票设计。从所提出的计算结果和实验结果的比较，可以得出结论，粗晶粒建模允许预测的残留层厚度的精度优于10%。(c)2007 Elsevier B. V.保留所有权利。
A refined coarse-grain method for simultaneous calculation of the resist viscous flow in nanoimprint lithography and the stamp/substrate deformation is presented. The method has been realized in an effective simulation tool for the verification of stamp structures on standard personal computers, by using the GDS data of the stamp design. From the presented comparison of calculated and experimental results, it can be concluded that the coarse-grain modeling allows predicting the residual layer thickness with accuracy better than 10%. (c) 2007 Elsevier B.V. All rights reserved.