Structure and solid state reactions of laser‐deposited and sputtered Fe/Nb and Fe/Ag multilayers
Structure and solid state reactions of laser‐deposited and sputtered Fe/Nb and Fe/Ag multilayers
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激光沉积和溅射 Fe/Nb 和 Fe/Ag 多层膜的结构和固态反应
DOI：
10.1063/1.358897
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发表时间：
1995
期刊：
影响因子：
--
通讯作者：
H. Krebs
中科院分区：
文献类型：
--
作者：
Y. Luo;H. Krebs
用x射线衍射研究了激光沉积和溅射的Fe/Nb和Fe/Ag多层膜的结构。结果表明，两种沉积工艺在织构、界面锐度和合金临界双层厚度方面存在显著差异。对于较小的双层厚度，采用计算机模拟的一维模型分析了测量的x射线衍射图，其中包括晶体层之间非晶或无序夹层的出现，并考虑了层厚的波动。这些模拟结果表明，在制备的Fe/Nb多层膜中存在薄的非晶间层，并描述了在相变早期阶段的互扩散反应中厚度的增加。在Fe/Ag多层材料中，界面在沉积后呈无序状态，在250℃左右退火时，界面首先锐化，然后晶粒粗化。
The structure of laser‐deposited and sputtered Fe/Nb and Fe/Ag multilayers was investigated by x‐ray diffraction. Significant differences in the textures, sharpness of the interfaces, and critical bilayer thicknesses for alloys are obtained for these two deposition processes. For small bilayer thicknesses, the measured x‐ray‐diffraction patterns were analyzed by computer simulations using a one‐dimensional model, which includes the occurrence of amorphous or disordered interlayers between the crystalline layers and takes layer thickness fluctuations into account. These simulations indicate that already in as‐prepared Fe/Nb multilayers thin amorphous interlayers exist and describe the thickness increase during an interdiffusion reaction already in the early stages of the transformation. In the case of Fe/Ag multilayers, the interfaces are disordered after deposition and first sharpen during annealing at about 250 °C, before grain coarsening occurs.