Study of metal deposition on low Z samples during ECR and glow discharge cleaning in TEXTOR
Study of metal deposition on low Z samples during ECR and glow discharge cleaning in TEXTOR
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TEXTOR 中 ECR 和辉光放电清洗期间低 Z 样品上金属沉积的研究
DOI：
10.1016/0022-3115(87)90416-8
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发表时间：
1987
影响因子：
3.1
通讯作者：
F. Waelbroeck
中科院分区：
文献类型：
--
作者：
H. Amemiya;S. Ishii;H. Oyama;Y. Sakamoto;Y. Hori;K. Akaishi;N. Noda;H. Minagawa;T. Yamashina;J. Winter;T. Banno;H. G. Esser;P. Wienhold;F. Waelbroeck
将POCO石墨样品暴露于电子回旋共振（ECR）等离子体5 h。通过AES分析样品的表面。另一个石墨样品经射频辅助辉光放电（RG）处理6 h后，其表面未出现金属沉积。铁和镍被发现与AES，在表面浓度分别为3%和1%。用朗缪尔探针测得ECR等离子体的空间电位小于20 V，RG放电的空间电位小于265 V。在ECR放电的情况下，离子对壁的撞击能量低于金属溅射的阈值能量。实际上，没有发生碳样品的金属污染。
A POCO graphite sample was exposed to an electron cyclotron resonance (ECR) plasma for 5 h. Surfaces of the sample were analyzed by AES. No metal deposition was found. Another graphite sample was exposed to an RF-assisted glow (RG) discharge for 6 h. Iron and nickel were found with AES, at surface concentrations of 3% and 1%, respectively. The space potential measured by a Langmuir probe was less than 20 V for ECR plasma and 265 V for RG discharge. In the case of the ECR discharge, the impact energy of ions on the wall is lower than the threshold energy of metal sputtering. Actually, no metal contamination of the carbon sample occurred.