Imprint and transfer fabrication of freestanding plasmonic membranes
Imprint and transfer fabrication of freestanding plasmonic membranes
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DOI：
10.1088/1361-6528/ab98bf
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发表时间：
2020-06
期刊：
影响因子：
3.5
通讯作者：
Longju Liu;H. Monshat;Hsin-Yu Wu;Meng Lu
中科院分区：
文献类型：
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作者：
Longju Liu;H. Monshat;Hsin-Yu Wu;Meng Lu
本文报道了一种压印和转移的方法，用于快速和廉价的制造超薄独立的等离子体膜（FPM），支持表面等离子体共振。压印和转移制造方法涉及在多孔聚合物膜上的软压印光刻，将穿孔聚合物膜转移到支撑框架，随后沉积金，以及最终去除聚合物膜。在不使用任何复杂的光刻和蚀刻工艺的情况下，压印和转移方法可以生产具有亚微米尺寸孔的2D阵列的独立金膜，这些孔支持中波长红外（中红外）范围内的等离子体模式。模拟、制作了阵列常数为4.0和2.5 μm的两种FPM器件，并测量了它们的透射特性。所制备的薄膜材料表现出表面等离子体激元布洛赫模和非寻常光透射（EOT），并在薄膜周围增强了局域场。薄膜厚度和角度色散对FPM的影响进行了研究，以显示红外EOT模式的调谐。此外，我们证明了FPM装置的折射传感和增强的红外吸收，其在化学和生物分子传感应用中的潜力。
This paper reports an imprint and transfer approach for the rapid and inexpensive fabrication of the ultra-thin freestanding plasmonic membrane (FPM) that supports surface plasmon resonances. The imprint and transfer fabrication method involves the soft imprint lithography on an ultrathin polymer film, transfer of the perforated polymer film to a supporting frame, subsequent deposition of gold, and final removal of the polymer film. Without using any sophisticated lithography and etching processes, the imprint and transfer method can produce freestanding gold membranes with 2D arrays of submicrometer-sized holes that support plasmonic modes in the mid-wavelength infrared (mid-IR) range. Two FPM devices with an array constant of 4.0 and 2.5 μm have been simulated, fabricated, and measured for their transmittance characteristics. The fabricated FPMs exhibit surface plasmon polariton Bloch mode and extraordinary optical transmission (EOT) with the enhanced local field around the membrane. The effects of membrane thickness and angle dispersion on the FPM were investigated to show the tuning of EOT modes in IR. Furthermore, we demonstrated the refractometric sensing and enhanced IR absorption of the FPM device for its potential in chemical and biomolecule sensing applications.