Preparation of ITO films using a spray pyrolysis solution containing an acetylacetone chelating agent
Preparation of ITO films using a spray pyrolysis solution containing an acetylacetone chelating agent
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使用含有乙酰丙酮螯合剂的喷雾热解溶液制备ITO薄膜
DOI：
10.2478/s13536-013-0159-8
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发表时间：
2014-01-01
影响因子：
1.1
通讯作者：
Ren, Yang
中科院分区：
文献类型：
--
作者：
Gao, Yun;Zhao, Gaoyang;Ren, Yang
以cl3中心点3H(2)O为前驱体，SnCl4中心点5H(2)O为掺杂剂，乙酰丙酮（AcAcH）为螯合剂，采用喷雾热解法在钠石灰玻璃衬底上沉积氧化铟锡（ITO）薄膜。研究了在喷雾溶液中加入AcAcH对ITO膜表面形貌的影响。添加了AcAcH的喷雾溶液制备的膜的表面质量优于不添加AcAcH的喷雾溶液。采用AcAcH喷雾溶液制备的ITO薄膜的电阻率最低，为4.75 x 10(4) Omega。Cm和更高的透光率分别为85%。
Indium tin oxide (ITO) films were deposited on soda-lime glass substrates by the spray pyrolysis method using a spray solution of InCl3 center dot 3H(2)O as a precursor, SnCl4 center dot 5H(2)O as a dopant and acetylacetone (AcAcH) as a chelating agent. The effect of the addition of AcAcH to the spray solution on the surface morphology of the ITO film was investigated. The surface quality of the film prepared from the spray solution with AcAcH was better than that without AcAcH. The ITO film with the thickness of 230 nm, using the spray solution with AcAcH, exhibited the lowest resistivity of 4.75 x 10(4) Omega.cm and higher optical transmittance of 85 %, respectively.