Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates
Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates
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DOI：
10.1021/ac0505167
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发表时间：
2005-08-15
影响因子：
7.4
通讯作者：
Hunt, AJ
中科院分区：
文献类型：
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作者：
Ke, K;Hasselbrink, EF;Hunt, AJ
微流体和纳米流体技术长期以来一直在寻求一种快速、可靠的方法来克服平面制造方法的创造性限制、光刻的分辨率限制以及快速原型制作的材料限制。在目前的工作中，我们演示了直接三维加工的亚微米直径，亚表面流体通道的玻璃，通过光学击穿临界强度附近，使用飞秒脉冲激光。不需要后蚀刻或粘合;通道网络（或表面下几乎任何任意形状的空腔）直接从“艺术到零件”生产。这种方法的关键是在液体存在的情况下使用非常低能量、高度聚焦的脉冲。由激光能量沉积产生的微泡轻轻膨胀并从通道中挤出加工碎屑。这些气泡是在一个高阻尼，低雷诺数制度，这意味着表面剥落，由于气泡崩溃是不重要的。我们展示了三维“跳线”，混合器，和复杂的3D微尺度分析系统的其他关键部件在玻璃基板上的快速原型。
Microfluidic and nanofluidic technologies have long sought a fast, reliable method to overcome the creative limitations of planar fabrication methods, the resolution limits of lithography, and the materials limitations for fast prototyping. In the present work, we demonstrate direct 3D machining of submicrometer diameter, subsurface fluidic channels in glass, via optical breakdown near critical intensity, using a femtosecond pulsed laser. No postexposure etching or bonding is required; the channel network (or almost any arbitrary-shaped cavity below the surface) is produced directly from "art-to-part". The key to this approach is to use very low energy, highly focused, pulses in the presence of liquid. Microbubbles that result from laser energy deposition gently expand and extrude machining debris from the channels. These bubbles are in a highly damped, low Reynolds number regime, implying that surface spalling due to bubble collapse is unimportant. We demonstrate rapid prototyping of three-dimensional "jumpers", mixers, and other key components of complex 3D microscale analysis systems in glass substrates.